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Alignment Stage - List of Manufacturers, Suppliers, Companies and Products

Alignment Stage Product List

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Ultra-High Precision Alignment Stage 'RST Aligner'

Ultra-High Precision Alignment Stage 'RST Aligner'

Achieving high tracking accuracy of 0.1μm ± 20nm! It beautifully engraves steps at the sub-micron level.

The "RST Aligner" is a super high-precision alignment stage with a drive unit arranged in a balanced equilateral triangle. This axis configuration enables high-precision micro-drives essential for alignment. The necessary calculations for control are provided free of charge. It consolidates the cutting-edge technology cultivated in the Mont Blanc series. Even at high resolution settings, it follows with excellent sensitivity. 【Features】 ■ Balanced equilateral triangle arrangement ■ Custom-designed drive unit ■ Large diameter transmission hole ■ Customizable table size ■ Z mechanism can be added ■ Custom support available *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices

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Alignment stage suitable for semiconductor manufacturing and inspection equipment.

Alignment stage suitable for semiconductor manufacturing and inspection equipment.

You can choose from the 'RST Aligner' that achieves a tracking capability of 0.1μm and the space-saving, thin, and compact 'YRA Series' according to your application needs.

【RST Aligner】 - The most notable feature is the balanced triangular arrangement of the drive units, enabling ultra-high precision micro-movement essential for alignment. - Achieves high responsiveness of 0.1μm ± 20nm without feedback from linear scales, etc. - Allows for large-diameter through holes since it does not use bearings. - Table size can be freely adjusted to match wafer size or workpiece size. - Z mechanism can be added as required for applications such as bonding. - Customizable for high load capacity specifications, color changes, and other specifications. 【YRA Series】 - Achieves high precision and high rigidity while being compact and space-saving. - Integrated structure where each axis of the XYθ axes operates independently. - Four models are available to suit various applications: - YRA-070: The smallest alignment stage in the series. - YRA-071: Capable of accommodating various motor modification requests. - YRA-131: Suitable for bonding small to medium-sized LCDs and wafers. - YRA-200: The largest model in the series with high load capacity specifications.

  • Semiconductor inspection/test equipment
  • Other semiconductor manufacturing equipment
  • Other image-related equipment

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[Guidebook Giveaway] Alignment Stage for Achieving Precise Positioning

[Guidebook Giveaway] Alignment Stage for Achieving Precise Positioning

Select a positioning stage suitable for your application! Introducing the single-axis combinations, high-rigidity YRA series, and ultra-high precision RSTA series, among others.

In the manufacturing process, accurate positioning is crucial for improving the precision and quality of products. Among these, alignment stages require not only the precision demanded of standard positioning stages but also attributes such as followability and positional stability, which are very important. Therefore, it is necessary to select an appropriate stage according to the required precision and positioning time during alignment. At Kozu Seiki, we offer a variety of alignment stages tailored to different applications. We feature the "YRA Series," which employs a guide mechanism that balances high precision and high rigidity, and the "RSTA Series," which achieves high followability with a 0.1μm pitch by evenly distributing the drive units. [YRA Series] - Guide mechanism that balances high precision and high rigidity - Achieves a slim, lightweight, and compact design - Utilizes high-precision ground ball screws - Employs easy-to-control stepping motors Additionally, we have prepared a guidebook regarding alignment stages. We hope it will be a useful reference for your selection process. *For more details, please refer to the PDF materials or feel free to contact us.*

  • Other machine elements

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Ultra-high precision 6-axis alignment stage "RSTZ Series"

Ultra-high precision 6-axis alignment stage "RSTZ Series"

High-precision alignment (within 1μm of the target) is now possible in all directions of X-Y-Z-θx-θy-θz.

By adopting a parallel link mechanism using a double wedge method in the conventional "RST aligner" drive unit, both lifting and tilting operations can be achieved with a single unit. 【Features】 ■ Maintains a low floor even with 6-axis drive. ■ High followability is achieved by arranging the drive units in a balanced equilateral triangle. ■ Equipped with high-rigidity cross roller guides for high load capacity specifications. (No issues with pressure during bonding) ■ Drive motors can be selected from various options, including servo motors, stepping motors, and AZ motors from different manufacturers. ■ The table is equipped with a large-diameter transparent hole. ■ By modularizing the drive components, the table size and shape can be freely designed, allowing us to propose a stage that perfectly meets your requirements. ■ DLL/sample code necessary for control is provided.

  • Sputtering Equipment
  • Semiconductor inspection/test equipment
  • Photomask

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Alignment Stage "SA...DE"

Alignment Stage "SA...DE"

Adopting a direct drive system! Achieving compact XYθ motion with a low profile.

The "SA…DE" is an alignment stage that uses a linear guide L for small linear motion devices in the linear motion section and a cross roller bearing in the rotary motion section. By fully closing the loop control of the direct drive stage, it achieves high resolution and high precision. It is easy to construct combinations of the X-axis and θ-axis or an XY-axis alignment table. 【Features】 ■ Compact XYθ table ■ Free combination of XYθ ■ Thin and compact ■ High resolution and high response *For more details, please refer to the PDF document or feel free to contact us.

  • Linear motor
  • Other machine elements

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