Alignment Stage Product List and Ranking from 5 Manufacturers, Suppliers and Companies

Last Updated：Oct 15, 2025 Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

Alignment Stage Manufacturer, Suppliers and Company Rankings

Last Updated：Oct 15, 2025 Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

神津精機 Kanagawa//Optical Instruments
藤川伝導機 Tokyo//Industrial Machinery
ヒーハイスト本社・埼玉工場 Saitama//Machine elements and parts
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5 三井電子産業機器分野のサービスパートーナー Tokyo//Electronic Components and Semiconductors

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Alignment Stage Product ranking

Last Updated：Oct 15, 2025 Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

Ultra-high precision 6-axis alignment stage "RSTZ Series" 神津精機
Alignment Stage "SA200DE" 藤川伝導機
Ultra-thin XYθ (alignment) stage "NAF3C series" ヒーハイスト本社・埼玉工場
Ultra-High Precision Alignment Stage 'RST Aligner' 神津精機
4 X・Y・θ Alignment Stage

Alignment Stage Product List

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Alignment Stage (NTX Type)

A thin stage with driving elements for linear motion and rotational motion arranged on the same plane!

The "Alignment Stage (NTX type)" is a slim stage that places the drive elements for linear motion and rotational motion on the same plane. It allows for free setting of the rotation center position. We can also accommodate special specifications tailored to your needs, such as size, stroke, and through holes. Please feel free to consult us for more details. 【Lineup】 ■NTX-C15-AC ■NTX-C25-AC ■NTX-C35-AC ■NTX-A50-AC ■NTX-A60-AC ■NTX-A70-AC *For more information, please refer to the PDF document or feel free to contact us.

Company：三井電子産業機器分野のサービスパートーナー
Price：Other

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Alignment Stage "SA200DE"

Standard settings for the X-axis and increased torque for the θ-axis! Updated the 200 size of the SA series.

The "SA200DE" is an alignment stage that has been newly added with the standard setting of SA200DE/X, which is an X-table for linear positioning. By combining it with the SA200DE/S, which is for rotational positioning, it is possible to easily construct an extremely compact alignment stage that can move in three directions: XYθ axes. Compared to stages driven by ball screws, it achieves an extremely low profile height. 【Features】 ■ Free combination of XYθ axes ■ Thin and compact ■ Energy-efficient with high tact *For more details, please refer to the PDF materials or feel free to contact us.

Company：藤川伝導機
Price：Other

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Alignment Stage "SA"

Easily construct combinations of the X-axis and θ-axis, as well as alignment tables for the XY axes!

The "SA" is an alignment stage that adopts a direct drive system for the drive unit, achieving low-profile and compact XYθ motion. It features a basic configuration consisting of an X table for linear movement and a θ table for rotational positioning. It allows for easy construction of combinations of the X and θ axes or an XY axis alignment table. Additionally, it employs coreless linear motors, linear ways L, and cross roller bearings, achieving an extremely low profile height. 【Features】 ■ Compact XYθ table ■ Free combination of XYθ ■ Thin and compact ■ High resolution and high response *For more details, please refer to the PDF document or feel free to contact us.

Company：藤川伝導機
Price：Other

Linear motor
Metal bearings

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Ultra-thin XYθ (alignment) stage "NAF3C series"

Ultra-thin stage with electric actuators arranged on the same plane - High rigidity achieved by adopting a double slide structure - *CAD drawing sample available*

The ultra-thin XYθ (alignment) stage "NAF3 series" is an ultra-thin stage with electric actuators arranged on the same plane, allowing for a low center of gravity for the entire device. The sliding part adopts a "preloaded double slide" structure, which sandwiches an intermediate plate between two upper and lower plates. Numerous balls are placed between each plate, enabling smooth planar rolling motion. 【Features】 ○ Ultra-thin structure and low center of gravity ⇒ By arranging three-axis actuators on the same plane, height is minimized. ○ High precision positioning ⇒ No assembly errors due to stacking, as it uses a non-stacking method. ○ High rigidity ⇒ The double slide structure supports the load as a whole, providing high rigidity against thrust direction. For more details, please contact us or download the catalog.

Company：ヒーハイスト本社・埼玉工場
Price：Other

Metal bearings

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Ultra-High Precision Alignment Stage 'RST Aligner'

Achieving high tracking accuracy of 0.1μm ± 20nm! It beautifully engraves steps at the sub-micron level.

The "RST Aligner" is a super high-precision alignment stage with a drive unit arranged in a balanced equilateral triangle. This axis configuration enables high-precision micro-drives essential for alignment. The necessary calculations for control are provided free of charge. It consolidates the cutting-edge technology cultivated in the Mont Blanc series. Even at high resolution settings, it follows with excellent sensitivity. 【Features】 ■ Balanced equilateral triangle arrangement ■ Custom-designed drive unit ■ Large diameter transmission hole ■ Customizable table size ■ Z mechanism can be added ■ Custom support available *For more details, please refer to the PDF document or feel free to contact us.

Company：神津精機
Price：Other

Other inspection equipment and devices

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XYθ Thin-Type Alignment Stage Series

We offer a variety of alignment stages that can accommodate diverse motor modification requests!

We offer the XYθ thin alignment stage series, including the 'YRA-070', which is suitable for the assembly of small devices. We also have the 'YRA-071', which accommodates various motor modification requests, the 'YRA-131', which is ideal for bonding small to medium-sized LCDs and wafers, and the 'YRA-200', which has the highest load capacity in the series. Please feel free to consult us if you have any requests. 【Product Lineup】 ■YRA-070: The smallest alignment stage in the series ■YRA-071: Capable of accommodating various motor modification requests ■YRA-131: Well-suited for bonding small to medium-sized LCDs and wafers ■YRA-200: The highest load capacity specification in the series *For more details, please download the PDF or feel free to contact us.

Company：神津精機
Price：Other

Image Processing Equipment
Other inspection equipment and devices

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Alignment stage suitable for semiconductor manufacturing and inspection equipment.

You can choose from the 'RST Aligner' that achieves a tracking capability of 0.1μm and the space-saving, thin, and compact 'YRA Series' according to your application needs.

【RST Aligner】 - The most notable feature is the balanced triangular arrangement of the drive units, enabling ultra-high precision micro-movement essential for alignment. - Achieves high responsiveness of 0.1μm ± 20nm without feedback from linear scales, etc. - Allows for large-diameter through holes since it does not use bearings. - Table size can be freely adjusted to match wafer size or workpiece size. - Z mechanism can be added as required for applications such as bonding. - Customizable for high load capacity specifications, color changes, and other specifications. 【YRA Series】 - Achieves high precision and high rigidity while being compact and space-saving. - Integrated structure where each axis of the XYθ axes operates independently. - Four models are available to suit various applications: - YRA-070: The smallest alignment stage in the series. - YRA-071: Capable of accommodating various motor modification requests. - YRA-131: Suitable for bonding small to medium-sized LCDs and wafers. - YRA-200: The largest model in the series with high load capacity specifications.

Company：神津精機
Price：Other

Semiconductor inspection/test equipment
Other semiconductor manufacturing equipment
Other image-related equipment

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[Guidebook Giveaway] Alignment Stage for Achieving Precise Positioning

Select a positioning stage suitable for your application! Introducing the single-axis combinations, high-rigidity YRA series, and ultra-high precision RSTA series, among others.

In the manufacturing process, accurate positioning is crucial for improving the precision and quality of products. Among these, alignment stages require not only the precision demanded of standard positioning stages but also attributes such as followability and positional stability, which are very important. Therefore, it is necessary to select an appropriate stage according to the required precision and positioning time during alignment. At Kozu Seiki, we offer a variety of alignment stages tailored to different applications. We feature the "YRA Series," which employs a guide mechanism that balances high precision and high rigidity, and the "RSTA Series," which achieves high followability with a 0.1μm pitch by evenly distributing the drive units. [YRA Series] - Guide mechanism that balances high precision and high rigidity - Achieves a slim, lightweight, and compact design - Utilizes high-precision ground ball screws - Employs easy-to-control stepping motors Additionally, we have prepared a guidebook regarding alignment stages. We hope it will be a useful reference for your selection process. *For more details, please refer to the PDF materials or feel free to contact us.*

Company：神津精機
Price：Other

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Ultra-high precision 6-axis alignment stage "RSTZ Series"

High-precision alignment (within 1μm of the target) is now possible in all directions of X-Y-Z-θx-θy-θz.

By adopting a parallel link mechanism using a double wedge method in the conventional "RST aligner" drive unit, both lifting and tilting operations can be achieved with a single unit. 【Features】 ■ Maintains a low floor even with 6-axis drive. ■ High followability is achieved by arranging the drive units in a balanced equilateral triangle. ■ Equipped with high-rigidity cross roller guides for high load capacity specifications. (No issues with pressure during bonding) ■ Drive motors can be selected from various options, including servo motors, stepping motors, and AZ motors from different manufacturers. ■ The table is equipped with a large-diameter transparent hole. ■ By modularizing the drive components, the table size and shape can be freely designed, allowing us to propose a stage that perfectly meets your requirements. ■ DLL/sample code necessary for control is provided.

Company：神津精機
Price：1 million yen-5 million yen

Sputtering Equipment
Semiconductor inspection/test equipment
Photomask

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Alignment Stage "SA...DE"

Adopting a direct drive system! Achieving compact XYθ motion with a low profile.

The "SA…DE" is an alignment stage that uses a linear guide L for small linear motion devices in the linear motion section and a cross roller bearing in the rotary motion section. By fully closing the loop control of the direct drive stage, it achieves high resolution and high precision. It is easy to construct combinations of the X-axis and θ-axis or an XY-axis alignment table. 【Features】 ■ Compact XYθ table ■ Free combination of XYθ ■ Thin and compact ■ High resolution and high response *For more details, please refer to the PDF document or feel free to contact us.

Company：日本トムソン
Price：Other

Linear motor
Other machine elements

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Alignment Stage "SA...DE"

A compact XYθ motion alignment stage with a low profile! The lineup consists of an X table and a θ table as the basic configuration.

The "SA…DE" is an alignment stage that uses a linear way L in the linear motion guide and a cross roller bearing in the rotary motion guide. It employs a direct drive system for the drive unit, achieving low-profile and compact XYθ motion. By incorporating a high-resolution linear encoder and implementing full closed-loop control, it achieves high resolution and high precision. 【Features】 ■ Compact XYθ table ■ Free combination of XYθ ■ Thin and compact ■ High resolution and high response *For more details, please download the PDF or feel free to contact us.

Company：藤川伝導機
Price：Other

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Alignment Stage 'SA…DE/T'

The rotation guide of the direct drive system uses IKO cross roller bearings! It achieves an extremely low profile height.

The "SA…DE/T" is an alignment stage that achieves low-profile and compact XYθ motion using a direct drive system. Conventional rotary types had limitations on the rotation angle, but the newly added infinite rotation type (this product) supports motion angles exceeding 360 degrees and continuous rotation. Additionally, by fully closed-loop controlling the stage with a built-in high-resolution encoder using a direct drive system, high resolution and high precision are achieved. 【Features】 ■ Free combination of XYθ axes ■ Thin and compact ■ High resolution and high response *For more details, please download the PDF or feel free to contact us.

Company：藤川伝導機
Price：Other

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